技术参数及配置要求 (略) kPa(760 Torr). Accuracy: ±1% full scale including linearity at calibration conditions. ±1.5% full scale including linearity for flow ranges greater than 20 slpm. Repeatability: 0.25% of rate Response Time: Less than 3 seconds response to within 2% of full scale final value with a 0 to 100% command step. Power Requirements(NC Valve): +15 Vdc ±5%,35 mA -15 Vdc ±5%,180 mA 3.5 watts power consumption Power Requirements(NO Valve): +15 Vdc ±5%,215 mA -15 Vdc ±5%,180 mA 11.85 watts power consumption Ambient Temperature Limits: Operating:40°F to 150°F (5°C to 65°C) Non-operating: -13°F to +212F (-25C to 100°C) Working Pressure: 1500 psi (10.342 mPa) maximum Differential Pressure: 5 to 50 psi (minimum pressure drop depends on gas and range). Refer to Orifice Sizing, Section 4-6. Output Signal: 0-5 Vdc into 2000 ohms or greater. Maximum ripple 3 mV. 5 Volt Reference Output: 5 Volts ±0.2%. Maximum load 1 k ohms. Temperature Sensitivity: Zero: less than ±0.075% F.S. per degree C. Span: less than ±1.0% F.S. shift over 10-50°C range Power Supply Sensitivity: ±0.09% full scale per % power supply voltage variation Mounting Attitude Sensitivity: ±0.5% maximum full scale deviation after re-zeroing Command Input: 0-5 Vdc. Input resistance 200 k ohm Leak Integrity: 1 x10-9Atm.cc/sec Helium Control Range: 50 to 1 Mechanical Connection: Compatible with most popular mass flow controllers. Refer to Figure 2-1. Electrical Connection: Card edge, 20 terminals, gold over low stress nickel plated copper.15-pin D-Connector(DA-15P) |